Substrate bonding apparatus and substrate bonding method

ABSTRACT

To improve the throughput of substrate bonding. A substrate bonding apparatus that bonds first and second substrates so that contact regions in which the first and second substrates contact are formed in parts of the first and second substrates and the contact regions enlarge from the parts, the apparatus including: a detecting unit detecting information about the contact regions; and a determining unit determining that the first and second substrates can be carried out based on the information detected at the detecting unit. In the substrate bonding apparatus, the information may be information, a value of which changes according to progress of enlargement of the contact regions, and the determining unit may determine that the first and second substrates can be carried out if the value becomes constant or if a rate of changes in the value becomes lower than a predetermined value.

The contents of the following International patent application areincorporated herein by reference:

-   -   PCT/JP2016/087793 filed on Dec. 19, 2016.

BACKGROUND 1. Technical Field

The present invention relates to a substrate bonding apparatus and asubstrate bonding method.

2. Related Art

There are apparatuses that bond pairs of substrates by activating frontsurfaces of the substrates and bring the activated front surfaces intocontact with each other (please see Patent Document 1, for example).

-   Patent Document 1: Japanese Patent Application Publication No.    2013-258377

Lengths of time required from the start to the completion of bondingdiffer in some cases depending on the conditions of pairs of substratesto be bonded or the like. Because of this, if bonding is considered ashaving been completed when a certain length of time has passed after thestart of bonding, differences in bonding time are absorbed by settingthe certain length of time longer. As a result, if an actual length oftime required for bonding substrates is shorter than a set length oftime, waiting time is generated after the completion of the bondinguntil a next process is started, so the waiting time becomes waste.

SUMMARY

A first aspect of the present invention provides a substrate bondingapparatus that bonds a first substrate and a second substrate so thatcontact regions in which the first substrate and the second substratecontact are formed in parts of the first substrate and the secondsubstrate and the contact regions enlarge from the parts, the substratebonding apparatus including: a detecting unit that detects informationabout the contact regions; and a determining unit that determines thatthe first substrate and the second substrate can be carried out based onthe information detected at the detecting unit.

A second aspect of the present invention provides a substrate bondingmethod of bonding a first substrate and a second substrate so thatcontact regions in which the first substrate and the second substratecontact are formed in parts of the first substrate and the secondsubstrate and the contact regions enlarge from the parts, the substratebonding method including: detecting information about the contactregions; and determining that the first substrate and the secondsubstrate can be carried out based on the information detected at thedetecting.

The summary clause does not necessarily describe all necessary featuresof the embodiments of the present invention. The present invention mayalso be a sub-combination of the features described above.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic view of a substrate bonding apparatus 100.

FIG. 2 is a schematic plan view of a substrate 210.

FIG. 3 is a flowchart showing a procedure of placing the substrates 210one upon another.

FIG. 4 is a schematic sectional view of a substrate holder 221 holding asubstrate 211.

FIG. 5 is a schematic sectional view of a substrate holder 223 holding asubstrate 213.

FIG. 6 is a schematic sectional view of a bonding unit 300.

FIG. 7 is a schematic sectional view of the bonding unit 300.

FIG. 8 is a schematic sectional view of the bonding unit 300.

FIG. 9 is a schematic sectional view of the bonding unit 300.

FIG. 10 is a schematic view showing the state of the substrates 211, 213in the course of bonding.

FIG. 11 is a schematic sectional view of the bonding unit 300.

FIG. 12 is a schematic view showing the state of the substrates 211, 213in the course of bonding.

FIG. 13 is a schematic view showing the state of the substrates 211, 213in the course of bonding.

FIG. 14 is a schematic view for explaining operation of a detector 341.

FIG. 15 is a schematic view for explaining operation of the detector341.

FIG. 16 is a schematic view showing the state of the substrates 211, 213in the course of bonding.

FIG. 17 is a schematic view showing the state of the substrates 211, 213in the course of bonding.

FIG. 18 is a schematic view showing the state of the substrates 211, 213in the course of bonding.

FIG. 19 is a schematic view showing the state of the substrates 211, 213in the course of bonding.

FIG. 20 is a schematic view for explaining another structure of thedetector 341.

FIG. 21 is a schematic view for explaining operation of the detector341.

FIG. 22 is a schematic view for explaining operation of the detector341.

FIG. 23 is a schematic view for explaining the structure of an observingunit 345.

FIG. 24 is a schematic view for explaining another structure of adetector 343.

FIG. 25 is a schematic view for explaining operation of the detector343.

FIG. 26 is a schematic view for explaining the structure of an observingunit 346.

FIG. 27 is a schematic view for explaining operation of the observingunit 346.

FIG. 28 is a schematic view for explaining the structure of an observingunit 347.

FIG. 29 is a schematic view for explaining the structure of an observingunit 348.

FIG. 30 is a schematic view for explaining the structure of an observingunit 349.

FIG. 31 is a schematic view for explaining the structure of an observingunit 610.

FIG. 32 is a schematic view for explaining the structure of an observingunit 620.

FIG. 33 is a schematic sectional view showing the structure of a part ofthe bonding unit 300.

FIG. 34 is a flowchart showing a part of the procedure of operation ofthe bonding unit 300.

FIG. 35 is a figure showing operation of the bonding unit 300.

FIG. 36 is a figure showing operation of the bonding unit 300.

FIG. 37 is a figure showing operation of the bonding unit 300.

FIG. 38 is a figure showing operation of the bonding unit 300.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

Hereinafter, (some) embodiment(s) of the present invention will bedescribed. The embodiment(s) do(es) not limit the invention according tothe claims, and all the combinations of the features described in theembodiment(s) are not necessarily essential to means provided by aspectsof the invention.

FIG. 1 is a schematic plan view of a substrate bonding apparatus 100.The substrate bonding apparatus 100 includes: a housing 110; substratecassettes 120, 130 and a control unit 150 that are disposed on theoutside of the housing 110; and a carrying unit 140, a bonding unit 300,a holder stocker 400 and a pre-aligner 500 that are disposed inside thehousing 110. The internal temperature of the housing 110 is managed, andis for example kept at room temperature.

One of the substrate cassettes, the substrate cassette 120, houses aplurality of substrates 210 that are about to be placed one uponanother. The other of the substrate cassettes, the substrate cassette130, can house a plurality of bonded substrates 230 fabricated byplacing the substrates 210 one upon another. The substrate cassettes120, 130 can be individually attached to and detached from the housing110. In this manner, by using the substrate cassette 120, the pluralityof substrates 210 can be carried into the substrate bonding apparatus100 at once. In addition, by using the substrate cassette 130, theplurality of bonded substrates 230 can be carried out of the substratebonding apparatus 100 at once.

The carrying unit 140 serves the carriage function inside the housing110. The carrying unit 140 carries a single substrate 210, a substrateholder 220, a substrate holder 220 holding a substrate 210, a bondedsubstrate 230 formed by stacking substrates 210 and the like.

The control unit 150 performs overall control of the respective units ofthe substrate bonding apparatus 100 such that they cooperate with eachother. In addition, by receiving a user instruction from the outside,the control unit 150 sets manufacturing conditions to be applied inmanufacturing bonded substrates 230. Furthermore, the control unit 150also has a user interface on which the operational state of thesubstrate bonding apparatus 100 is displayed to the outside.

The bonding unit 300 has a pair of stages each of which holds asubstrate 210 and faces the other, and under the control of the controlunit 150, positions the two substrates 210 held on the stages relativeto each other and thereafter brings them into contact with each otherand bonds them together. Thereby, the substrates 210 form a bondedsubstrate 230. The bonded state includes a state where terminalsprovided to the two substrates 210, respectively, are electricallyconnected together between the substrates 210 and a state whereinsulating films formed on front surfaces of the two substrates 210 arejoined together and an electrical connection is not made between thesubstrates 210. In either state, the two substrates 210 may be separableor inseparable. If the two bonded substrates 210 are separable, the twosubstrates 210, after being bonded together, are preferably carried intoa heating apparatus such as an annealing furnace and heated.

The holder stocker 400 houses a plurality of substrate holders 220. Asubstrate holder 220 is formed of a hard material such as aluminaceramics, and has a holding unit that adsorbs a substrate 210 and anedge portion disposed on the outside of the holding unit. Inside thesubstrate bonding apparatus 100, substrate holders 220 individually holdsubstrates 210 and are handled integrally with the substrates 210.Thereby, flatness of substrates 210 that are warped or bent can beensured.

If a bonded substrate 230 is to be carried out of the substrate bondingapparatus 100, a substrate holder 220 is separated from the bondedsubstrate 230 and housed in the holder stocker 400 again. Thereby, asmall number of substrate holders 220 can be used repeatedly.Accordingly, substrate holders 220 can also be considered as a part ofthe substrate bonding apparatus 100.

The pre-aligner 500 cooperates with the carrying unit 140 to cause asubstrate 210 carried into the substrate bonding apparatus 100 to beheld by a substrate holder 220. In addition, the pre-aligner 500 may beused if a bonded substrate 230 carried out of the bonding unit 300 is tobe separated from a substrate holder 220.

The substrate bonding apparatus 100 can also bond unprocessed siliconwafers, compound semiconductor wafers, glass substrates or the like,besides substrates 210 on which elements, circuits, terminals or thelike are formed. In addition, it can also bond a circuit substrate onwhich a circuit is formed and an unprocessed substrate together, andalso bond substrates of the same type together, such as circuitsubstrates or unprocessed substrates. Furthermore, substrates 210 to bejoined may themselves be bonded substrates 230 already formed bystacking a plurality of substrates.

FIG. 2 is a schematic plan view of a substrate 210 that can be bonded inthe substrate bonding apparatus 100. The substrate 210 has: a notch 214;and a plurality of circuit regions 216 and a plurality of alignmentmarks 218.

The notch 214 is formed in the circumference of the substrate 210 whichis approximately circular as a whole, and serves as an index markindicating the crystal orientation of the substrate 210. In addition,when the substrate 210 is handled, the array direction of the circuitregions 216 in the substrate 210 and the like can also be known bydetecting the position of the notch 214. Furthermore, if circuit regions216 including mutually different circuits are formed in a singlesubstrate 210, the circuit regions 216 can be distinguished from oneanother using the notch 214 as a reference point.

The circuit regions 216 are disposed on a front surface of the substrate210 orderly in the plane direction of the substrate 210. Each of thecircuit regions 216 is provided with a semiconductor apparatus, wire,protection film or the like formed by a photolithography technique orthe like. Also in the circuit regions 216 are disposed pads, bumps orthe like to serve as connection terminals if the substrate 210 is to beelectrically connected to another substrate 210, a lead frame or thelike.

The alignment marks 218 are disposed for example overlapping scribelines 212 disposed between the circuit regions 216, and are used asindex marks if the substrate 210 is to be positioned relative to anothersubstrate 210 which is a stacking target. Because the scribe lines 212are regions to be removed finally by dicing, the area of the circuitregions 216 is never squeezed by providing the alignment marks 218. Thealignment marks 218 may be disposed inside the circuit regions 216 orparts of structures formed in the circuit regions 216 may be utilized asthe alignment marks 218.

FIG. 3 is a flowchart showing a procedure of fabricating a bondedsubstrate 230 by bonding substrates 210 in the substrate bondingapparatus 100. In the substrate bonding apparatus 100, the control unit150 controls operation of the respective units. In addition, the controlunit 150 operates also as a determining unit that determines whether ornot bonding of substrates 210 is completed.

Inside the substrate bonding apparatus 100, substrates 210 aremanipulated by being held by substrate holders 220 one by one.Accordingly, the control unit 150 first causes substrate holders 220 tohold substrates 210 taken out of the substrate cassette 120 one by onein the pre-aligner 500. Next, the control unit 150 causes a plurality ofsubstrates 210 which are to be bonded together to be carried into thebonding unit 300 together with substrate holders 220 (Step S101).

Next, the control unit 150 detects alignment marks 218 provided to eachof the substrates 210 carried into the bonding unit 300 (Step S102). Inaddition, based on the positions of the detected alignment marks 218,the control unit 150 detects the relative positions of the plurality ofsubstrates 210 to be bonded (Step S103).

Next, the control unit 150 activates front surfaces of the substrates210 (Step S104). The substrate 210 can activate the front surfaces ofthe substrates 210 for example by making them exposed to plasma andpurifying them. Thereby, if a substrate 210 is brought into contact withanother substrate 210, the substrates 210 adhere to each other andbecome integrated. Substrates 210 can be activated also by a mechanicalprocess such as polishing or a chemical process such as washing. Inaddition, a plurality of types of activation methods may be usedtogether.

Next, the control unit 150 starts temperature control on the substrates210 to be bonded (Step S105). The temperature control executed here is,for example, temperature control for correction to compensate fordifferences in magnification from the design specifications ofsubstrates 210. In addition, deformation of substrates 210 such aswarping may be corrected using also a method other than temperaturecontrol, for example, a correction approach using an actuator mentionedbelow. Thereby, even if individual substrates 210 are distorteduniquely, the plurality of substrates 210 can be positioned accurately.

Next, the control unit 150 positions the plurality of substrates 210 tobe bonded relative to each other (Step S106). The positioning isexecuted by relatively moving one substrate 210 relative to anothersubstrate 210 based on the relative positions of the substrates 210detected at Step S103.

Next, in order to form a bonding starting point between parts of thesubstrates 210, the control unit 150 brings parts of the substrates 210that are placed one upon another into contact with each other (StepS107). The mutually contacting parts are contact regions where thesubstrates 210 contact each other, and which are formed when bonding isstarted. The starting point may be a region having an area. The bondingstarting point between a pair of substrates 210 to be bonded is formedby pressing a part of one substrate 210 against a part of anothersubstrate 210 to expel the atmosphere or the like sandwiched between thesubstrates 210 and bring the substrate 210 into direct contact with eachother.

Due to this contact, the contact regions of the two substrates 210 thathave been activated are bonded by a chemical bond such as a hydrogenbond. After the parts of the two substrates 210 are brought intocontact, the two substrates 210 are kept in contact with each other. Atthis time, the contact regions may be enlarged by increasing the areasof the contacting parts by pressing the substrates 210 against eachother. After the passage of a predetermined length of time while thecontacting state is being maintained, bonding force which issufficiently high to keep a positional shift from occurring between thetwo substrates 210 in the course of bonding between the substrates 210is ensured between the two substrates 210. Thereby, a bonding startingpoint is formed between the mutually contacting parts of the substrates210.

If bonding starting points are formed at a plurality of locations in theplane direction of the substrates 210, bubbles left in regionssandwiched by the plurality of starting points cannot be discharged inthe course of bonding so that voids are generated in a finally completedbonded substrate 230, in some cases. Accordingly, if two substrates 210are bonded, preferably, a bonding starting point is formed at onelocation of the substrates 210, and the contact regions where thesubstrates 210 are bonded together are enlarged from the bondingstarting point to bond the entire substrates 210.

To cope with this, if substrates 210 are bonded in the bonding unit 300,for example, a raised portion is formed in one of the substrates 210 tobe bonded, and the raised portion is brought into contact with the othersubstrate 210 so that a bonding starting point is formed at onepreliminarily decided position. If a bonding starting point is formed,for the purpose of preventing starting points to be formed at aplurality of locations, preferably the shape of a raised portion of asubstrate is maintained until a bonding starting point is formed.

Next, the control unit 150 checks whether or not contact regions of thesubstrates 210, parts of which are pressed against each other, areformed, and the above-mentioned predetermined bonding force is ensuredbetween the two substrates 210 (Step S108). If it is to be detected thatthe substrates 210 are bonded at this stage, it is checked whether ornot a bonding starting point to serve as a trigger of the start ofbonding of the substrates 210 is formed. Accordingly, at Step S108, itis checked whether or not a region to serve as a bonding starting pointis formed in a region where parts of the substrates 210 are pressedagainst each other at Step S107 or at a position near the region.

Thereby, if it is determined that a bonding starting point is formedbetween the substrates 210 (Step S108: YES), that is, if the controlunit 150 determines that the above-mentioned predetermined bonding forceis ensured between the contacting parts of the two substrates 210,holding of at least one substrate 210 is discontinued to release thesubstrate 210 (Step S109), and it is allowed for the two substrates 210to be adsorbed to each other and bonded together by expanding thecontact regions of the two substrates 210. That is, the bonding unit 300constitutes a contacting unit. If it is not confirmed at Step S108 thata starting point is formed between the substrates 210 (Step S108: NO),the control unit 150 keeps pressing parts of the substrates 210 againsteach other so as to form a bonding starting point while at the same timecontinuing holding of both the substrates 210.

Next, the control unit 150 checks whether or not the contact regions ofthe substrates 210 are expanding from the bonding starting point formedbetween the substrates 210 (Step S110). Whether or not the contactregions of the substrates 210 have enlarged can be confirmed for exampleby checking whether or not contact regions are formed in regionsdifferent from the regions where the bonding starting point is formed.

If it is not confirmed at Step S110 that the contact regions of thesubstrates 210 are enlarging (Step S110: NO), the control unit 150determines that bonding of the substrates 210 is inhibited for somereason. To cope with this, after measures such as stopping operation ofthe bonding unit 300, issuing an alert to the outside, or carryingsubstrates 210 being bonded out of the bonding unit 300 are taken (StepS111), the control returns to Step S101 so as to start bonding of nextsubstrates 210.

If it is confirmed at Step S110 that the contact regions of thesubstrates 210 are enlarging (Step S110: YES), the control unit 150determines that bonding of the substrates 210 is progressing, and thecontrol proceeds to a next step. Next, the control unit 150 checkswhether or not bonding of the substrates 210 has been completed (StepS112). Completion of the bonding may be known for example by checkingwhether or not the contact regions of the substrates 210 are formed atthe outer edges of the substrates 210. Thereby, the control unit 150 cansurely confirm completion of the bonding even if lengths of timerequired for bonding differ substrate 210—by—substrate 210.

If the control unit 150 confirms at Step S112 that bonding of thesubstrates has been completed (Step S112: YES), it ends temperaturecontrol or the like on the substrates 211, 213 and carries out thebonded substrate 230 out of the bonding unit 300 by the carrying unit140 (Step S113). The substrates 210 carried out of the bonding unit 300are separated into the bonded substrate 230 and a substrate holder 220and housed in the substrate cassette 130.

In addition, if the control unit 150 cannot confirm at Step S112 thatbonding of the substrates has been completed (Step S112: NO), thecontrol unit 150 may repeatedly check completion of bonding of thesubstrates 210 until completion of bonding of the substrates 210 isconfirmed, but if completion of bonding of the substrates 210 cannot beconfirmed even after the passage of a predetermined threshold length oftime, bonding of the substrates 210 may be stopped as in the case ofStep S110: NO.

If the control unit 150 confirms at Step S110 that the contact regionsof the substrates 210 have enlarged, the control unit 150 may predict atime at which bonding of the substrates 210 will be completed bydetecting also the speed at which the contact regions of the substrates210 enlarge. The speed at which the contact regions of the substrates210 enlarge may be calculated by the control unit for example bymeasuring a length of time from when parts of the substrates 210 arepressed against each other at Step S107 until when it is detected thatthe substrate 210 are bonded in a region different from a bondingstarting point at Step S110.

In addition, upon formation of a bonding starting point between parts ofthe substrates 210, the relative positions of the plurality ofsubstrates 210 to be bonded are fixed in the plane direction of thesubstrates 210, and even if holding of at least one of the substrates210 to be bonded is discontinued, the substrates 210 will never bedisplaced or a positional shift of one of the substrates 210 to theother substrate never occurs. Accordingly, the control unit 150 maycarry two substrates 210 out of the bonding unit 300 before bonding ofthe substrates 210 is completed up to their circumference.

FIG. 4 is a schematic section showing the state where one substrate 211carried into the bonding unit 300 at Step S101 is held by a substrateholder 221. The substrate holder 221 has an electrostatic chuck, vacuumchuck or the like which causes the substrate 211 to be adsorbed to aholding surface 222, and thereby holds the substrate 211.

The holding surface 222 of the substrate holder 221 has a curved shapewith an elevated middle side portion and low circumference. Accordingly,the substrate 211 adsorbed to the holding surface 222 also is curvedinto a shape with a projecting middle side portion. In addition, whilethe substrate holder 221 keeps holding the substrate 211, the convexshape of the substrate 210 is maintained. The shape of the holdingsurface 222 of the substrate holder 221 may be a spherical surface, aparaboloid, a cylindrical surface or the like.

If the substrate 211 is adsorbed to the holding surface 222, in thecurved substrate 211, at the upper surface of the substrate 211 in thefigure, the front surface of the substrate 211 deforms to enlarge in theplane direction, as compared to a thickness-wise central line A of thesubstrate 211 indicated with an alternate long and short dash line inthe figure. In addition, at the lower surface of the substrate 211 inthe figure, the front surface of the substrate 211 deforms to shrink inthe plane direction.

Accordingly, by the substrate holder 221 holding the substrate 211, themagnification, on the plane, of circuit regions 216 formed on a frontsurface of the substrate 211 relative to design specifications alsoincreases. Accordingly, the magnification correction amount forsubstrates 211 may be adjusted by preparing a plurality of substrateholders 221 with holding surfaces 222 having different curvatures andchanging the deformation amount for the substrates 211.

In addition, the substrate holder 221 has a plurality of observationholes 227, 228, 229 penetrating the substrate holder 221 in thethickness direction. One of the observation holes, the observation hole227, is disposed in a region including the central axis X in the radialdirection of substrate holder 221. In addition, another one of theobservation holes, the observation hole 229, is disposed in a regionincluding the circumference of the substrate 211 held by the substrateholder 221. Furthermore, still another one of the observation holes, theobservation hole 228, is disposed at an intermediate position betweenthe other observation holes 227, 229. Each of the observation holes 227,228, 229 is filled with a material which is transparent to thewavelength of illumination light used when the substrate 211 isobserved, and the holding surface 222 of the substrate holder 221 formsa smooth curved surface.

FIG. 5 is a schematic section showing the state where another substrate213 is held by a substrate holder 223. The substrate holder 223 has aflat holding surface 224 and the function of adsorbing the substrate 213which is achieved by an electrostatic chuck, vacuum chuck or the like.The substrate 213 held by being adsorbed to the substrate holder 223closely contacts the holding surface 224 and becomes flat conforming tothe shape of the holding surface 224.

Accordingly, if in the bonding unit 300, the substrate 211 deformedconvexly by being held by the substrate holder 221 shown in FIG. 4 ispressed against the substrate 213 held by the substrate holder 223 shownin FIG. 5 in the flat state, the substrates 211, 213 are pressed hardagainst each other at one point in the middle. In addition, while eachof the substrate holders 221, 223 is holding the corresponding substrate211 or 213, regions of the substrates 211, 213 on the circumference sideremain separated from each other.

In the above-mentioned example, a combination of the convexly deformedsubstrate 211 and the flat substrate 213 is mentioned as an example. Butfor example also in cases that both the substrates 211, 213 are convexlydeformed, that the substrates 211, 213 are deformed into a convex shapeand a concave shape with mutually different curvatures, and that thesubstrates 211, 213 are deformed into cylindrical shapes withnon-parallel central axes, the substrates 211, 213 can be brought intocontact at one point in the bonding unit 300.

FIG. 6 is a schematic sectional view showing the structure of thebonding unit 300. In addition, FIG. 6 is also a figure showing the stateof the bonding unit 300 immediately after substrates 211, 213 andsubstrate holders 221, 223 are carried out. The bonding unit 300includes a frame body 310, an upper stage 322 and a lower stage 332.

The frame body 310 has a base plate 312 and a top plate 316 that areparallel with the horizontal floor surface, and a plurality of supports314 that are vertical to the floor plate. The base plate 312, support314 and top plate 316 form the rectangular parallelepiped frame body 310to house other members of the bonding unit 300.

The upper stage 322 is fixed to the lower surface of the top plate 316in the figure and faces downward. The upper stage 322 has the holdingfunction that is realized by a vacuum chuck, electrostatic chuck or thelike, and forms a holding unit to hold the substrate holder 221. In theillustrated state, the substrate holder 221 holding the substrate 211already is held by the upper stage 322.

In addition, the upper stage 322 has a plurality of observation windows327, 328, 329 provided corresponding to the positions of the observationholes 227, 228, 229 of the substrate holder 221 held by the upper stage322. Each of the observation windows 327, 328, 329 is filled with amaterial that is transparent to the wavelength of illumination lightused when the substrate 211 is observed, and the lower surface of theupper stage 322 forms a flat surface including also the regions wherethe observation windows 327, 328, 329 are disposed.

The bonding unit 300 has a plurality of detectors 341, 342, 343 that areprovided at the positions corresponding to the above-mentionedobservation windows 327, 328, 329 provided to the upper stage 322, andthe detectors 341, 342, 343 penetrate the top plate 316 of the framebody 310 in the thickness direction. The detectors 341, 342, 343 form anobserving unit 344 to observe the bonding state of the substrates 211,213 in the bonding unit 300 through: the observation windows 327, 328,329 that optically communicate with the lower surface of the upper stage322; and the observation holes 227, 228, 229 of the substrate holder221.

The detectors 341, 342, 343, for example, can be formed using alight-receiving unit such as a photodiode and an irradiation lightsource. In this case, upon the substrate holder 221 holding thesubstrate 211 being held by the upper stage 322, the optical intensityof light reflected on the substrates 211, 213 or the like can beobserved by the detectors 341, 342, 343 through the observation windows327, 328, 329 and observation holes 227, 228, 229.

In addition, the detectors 341, 342, 343, for example, can be formedusing an image-capturing element such as a CCD or a CMOS sensor and anillumination light source. In this case, upon the substrate holder 221holding the substrate 211 being held by the upper stage 322, an image ofthe substrate 211 held by the upper stage 322 can be captured by thedetectors 341, 342, 343 through the observation windows 327, 328, 329and observation holes 227, 228, 229, and the substrate 211 can beobserved thereby. In addition, if the substrates 211, 213 overlap in thebonding unit 300, images of the substrates 211, 213 can be captured atonce.

Furthermore, by using light at a long wavelength such as infrared lightas an irradiation light source or an illumination light source, thedetectors 341, 342, 343 can observe the substrate 213 bonded with thesubstrate 211 through the substrate 211 held by the upper stage 322.Outputs of the detectors 341, 342, 343 are processed for example at thecontrol unit 150, and bonding of the substrates 211, 213 is detectedbased on a result of observation by the detectors 341, 342, 343.

If infrared light is used as an illumination light source, changes inthe position of the boundary between the contact regions and non-contactregions of the substrates 211, 213 may be observed by capturing imagesof regions including the centers of the substrates 211, 213. In thiscase, at the moment when a bonding starting point is formed or in thecourse of enlargement of the contact regions, the shape of the contactregions is detected. The shape of the contact regions is one piece ofinformation about the state of enlargement of the contact regions. Thatis, the observing unit 344 constitutes a detecting unit to detectinformation about enlargement of the contact regions. The informationabout enlargement of the contact regions is information that changescorresponding to the degree of progress of the enlargement of thecontact regions. If it is determined at the control unit 150 that theshape of the contact regions is a shape meeting a predeterminedcondition, it may be determined that the contacting state of the contactregions is in a state where bonding can be performed appropriately lateron so that the substrates 211, 213 may be carried out of the lower stage332. The predetermined condition is, for example, that the shape of thecontact regions is almost completely round. The shape of the contactregions that meets a predetermined condition is stored preliminarily. Inaddition, if the shape of the contact regions is unique to each type ofwafers, each lot, each wafer manufacturing process or the like, therespective shapes of the contact regions during their enlargement may bestored in a storage unit preliminarily, and compared with an actualshape detected during joining.

In addition, if infrared light is used as an illumination light source,regions that extend from at least the centers of the substrates 211, 213toward their circumferential portions in the radial direction may betreated as observed regions. In this case, in the course of enlargementof the contact regions, the progress direction and/or progress speed ofenlargement of the contact regions can be estimated by performing aprocess of capturing a plurality of images consecutively for exampleevery 500 msec, and comparing an image of the contact regions capturedat one moment with an image of the contact regions captured at one priormoment.

The lower stage 332 is arranged oppositely to the upper stage 322, andis mounted on the upper surface, in the figure, of a Y-direction drivingunit 333 placed on an X-direction driving unit 331 disposed on the uppersurface of the base plate 312. The lower stage 332 forms a holding unitto hold the substrate 213 oppositely to the substrate 211 held by theupper stage 322. In the illustrated state, the substrate holder 223holding the substrate 213 already is held by the lower stage 332.

In the illustrated state, the substrate holder 221 having the curvedholding surface 222 is held by the upper stage 322 positioned on anupper side in the figure and the substrate 213 held by the substrateholder 223 having the flat holding surface 224 is held by the lowerstage 332 positioned on a lower side in the figure. But combinations ofthe upper stage 322 and lower stage 332, and the substrate holders 221,223 are not limited to them. In addition, the flat substrate holder 223or curved substrate holder 221 may be carried into both the upper stage322 and the lower stage 332.

In the bonding unit 300, the X-direction driving unit 331 moves in thedirection indicated by the arrow X in the figure, parallelly with thebase plate 312. On the X-direction driving unit 331, the Y-directiondriving unit 333 moves in the direction indicated by the arrow Y in thefigure, parallelly with the base plate 312. Operation of theseX-direction driving unit 331 and Y-direction driving unit 333 iscombined to move the lower stage 332 parallelly with the base plate 312and two-dimensionally. Thereby, the substrate 213 mounted on the lowerstage 332 can be positioned relative to the substrate 211 held by theupper stage 322.

In addition, the lower stage 332 is supported by a raising/loweringdrive unit 338 that rises and lowers vertically to the base plate 312 inthe direction indicated by the arrow Z. The lower stage 332 can rise andlower relative to the Y-direction driving unit 333. Thereby, theraising/lowering drive unit 338 forms a pressing unit that presses thesubstrate 213 mounted on the lower stage 332 against the substrate 211held by the upper stage 322.

The amount of movement of the lower stage 332 realized by theX-direction driving unit 331, Y-direction driving unit 333 andraising/lowering drive unit 338 is precisely measured by using aninterferometer or the like. In addition, the X-direction driving unit331 and Y-direction driving unit 333 may be configured as two stagesconsisting of a coarse moving unit and a fine moving unit. Thereby,highly accurate positioning and high throughput can both be achieved tomake it possible to join the substrate 213 mounted on the lower stage332, moving the substrate 213 fast without lowering control accuracy.

On the Y-direction driving unit 333, a microscope 334 and an activationapparatus 336 respectively are further mounted laterally next to thelower stage 332. The microscope 334 allows observation of thedownward-facing lower surface of the substrate 211 held by the upperstage 322. The activation apparatus 336 generates plasma to purify thelower surface of the substrate 211 held by the upper stage 322.

The bonding unit 300 may further include a rotation drive unit thatrotates the lower stage 332 about a rotation axis vertical to the baseplate 312 and an oscillation drive unit that oscillates the lower stage332. Thereby, the positioning accuracy of the substrates 211, 213 can beimproved by rotating the substrate 213 held by the lower stage 332, aswell as by making the lower stage 332 parallel with the upper stage 322.

Furthermore, the bonding unit 300 has a pair of a microscope 324 and themicroscope 334 and a pair of an activation apparatus 326 and theactivation apparatus 336. One of the microscopes, the microscope 324 andone of the activation apparatuses, the activation apparatus 326, arefixed to the lower surface of the top plate 316 and laterally next tothe upper stage 322. The microscope 324 allows observation of the uppersurface of the substrate 213 held by the lower stage 332. The activationapparatus 326 generates plasma to purify the upper surface of thesubstrate 213 held by the lower stage 332.

In addition, the other one of the microscopes, the microscope 334, andthe other one of the activation apparatuses, the activation apparatus336, are mounted on the Y-direction driving unit 333 and laterally nextto the lower stage 332. The microscope 334 allows observation of thelower surface of the substrate 211 held by the upper stage 322. Theactivation apparatus 336 generates plasma to purify the lower surface ofthe substrate 211 held by the upper stage 322.

The microscopes 324, 334 can be used at Step S102 in a procedure likethe one explained next. The control unit 150 calibrates the relativepositions of the microscopes 324, 334 by making the foci of themicroscopes 324, 334 coincide with each other, as shown in FIG. 6 .

Next, as shown in FIG. 7 , the control unit 150 operates the X-directiondriving unit 331 and Y-direction driving unit 333 to detect, using themicroscopes 324, 334, alignment marks 218 provided to the respectivesubstrates 211, 213 (Step S102 in FIG. 3 ). The control unit 150 knowsthe amount of movement of the lower stage 332 realized by theX-direction driving unit 331 and Y-direction driving unit 333 that hasbeen made until the alignment marks 218 are detected.

In this manner, by detecting the positions of the alignment marks 218 ofthe substrates 211, 213 using the microscopes 324, 334 whose relativepositions are known, the relative positions of the substrates 211, 213can be known (Step S103 in FIG. 3 ). Thereby, if the substrates 211, 213to be placed one upon another are to be positioned, the relativemovement amounts including the amounts of relative movement and rotationof the substrates 211, 213 that are necessary to make the positions ofthe detected alignment marks 218 coincide with each other may becalculated.

However, the respective substrates 211, 213 to form a bonded substrate230 are each distorted in some cases. Distortion that occurs to thesubstrates 211, 213 include: distortion that has certain tendency in theentire substrates 211, 213 such as warping or deflection of thesubstrates 211, 213; and non-linear distortion that occurs in the planedirections or radial directions of the substrates.

These types of distortion occur due to: stress that has occurred inprocesses of forming circuit regions 216 in the substrates 211, 213;anisotropy due to crystalline orientation of the substrates 211, 213;cyclic changes in rigidity or the like due to arrangement of scribelines 212, circuit regions 216 or the like; or the like. In addition,even if distortion is not occurring to individual ones of the substrates211, 213, in the course of bonding, the substrates 211, 213 may bedeformed at the boundary between contact regions which are regionsalready bonded and non-contact regions which are regions not bonded yet,and distortion also occur thereto in some cases.

If the respective substrates 211, 213 are distorted individuallydifferently, the value for making the positions of the alignment marks218 coincide with each other cannot be calculated in some cases even ifit is attempted to calculate the relative movement amounts at Step S106.To cope with this, it is possible to improve the positioning accuracy ofthe substrates 211, 213 by correcting distortion of at least one of thesubstrates 211, 213 by temperature control (Step S105).

For example, distortion due to differences in magnification of thecircuit regions 216 in the substrates 211, 213 from designspecifications can be corrected by changing the overall sizes of thesubstrates 211, 213 by adjusting the temperature of at least one of thesubstrates 211, 213. In addition, as has been explained already,distortion of the substrate 211 can also be corrected by causing thesubstrate holder 221, which has the curved or bent holding surface 222,to hold the substrate 211.

Furthermore, in the bonding unit 300, at least one of the upper stage322 and the lower stage 332 on which the substrates 211, 213 are mountedcan also be provided with an actuator to mechanically deform thesubstrate(s) 211, 213 to perform correction by deforming the at leastone of the substrates 211, 213. Thereby, the bonding unit 300 cancorrect distortion of the substrate(s) 211, 213 irrespective of whetherit is linear distortion or non-linear distortion.

FIG. 8 shows operation performed by the bonding unit 300 to activate thesubstrates 211, 213 (Step S104 in FIG. 3 ). The control unit 150 movesthe position of the lower stage 332 horizontally after resetting it toan initial position to scan front surfaces of the substrates 211, 213with plasma generated by the activation apparatuses 326, 336. Thereby,the respective front surfaces of the substrates 211, 213 are purifiedand become chemically highly active. Because of this, the substrates211, 213 can now autonomously adsorb each other and join with each othersimply by being brought close to each other.

The activation apparatuses 326, 336 radiate plasma P in a direction awayfrom each of the microscopes 324, 334. Thereby, it is possible toprevent the microscopes 324, 334 from being contaminated by fragmentsgenerated by the substrates 211, 213 irradiated with plasma.

In addition, although the bonding unit 300 includes the activationapparatuses 326, 336 to activate the substrates 211, 213, a differentstructure in which the activation apparatuses 326, 336 of the bondingunit 300 are omitted can also be employed, which structure is madepossible by carrying, into the bonding unit 300, the substrates 211, 213that are activated preliminarily by using the activation apparatuses326, 336 provided separately from the bonding unit 300.

Furthermore, the substrates 211, 213 can also be activated by sputteretching using an inert gas, an ion beam, a fast atomic beam or the like,besides a method of exposing them to plasma. If an ion beam or fastatomic beam is used, it is possible to generate the bonding unit 300under reduced pressure. Still furthermore, the substrates 211, 213 canalso be activated by ultraviolet light irradiation, ozone asher or thelike. Furthermore, for example, activation may be performed by using aliquid or gas etchant to chemically purify front surfaces of thesubstrates 211, 213.

Step S104 of activating at least one of the substrates 211, 213 and StepS105 of controlling the temperature of any of the substrates 211, 213may be replaced with each other in terms of the order. That is, asexplained above, the substrates 211, 213 may be activated (Step S104),and thereafter the temperature of at least one of the substrates 211,213 may be controlled (Step S105), or the temperature of at least one ofthe substrates 211, 213 may be controlled first (Step S105), andthereafter the substrates 211, 213 may be activated (Step S104).

FIG. 9 shows operation performed by the bonding unit 300 to position thesubstrates 211, 213 (Step S106 in FIG. 3 ). First, based on the relativepositions of the microscopes 324, 334 detected first and the positionsof the alignment marks 218 of the substrates 211, 213 detected at StepS102, the control unit 150 moves the lower stage 332 such that theamount of a positional shift between the substrates 211, 213 becomessmaller than a predetermined value.

FIG. 10 is a figure schematically showing how the substrates 211, 213appear in the state at Step S106 shown in FIG. 9 . As illustrated, thesubstrates 211, 213 held by the upper stage 322 and lower stage 332respectively through the substrate holders 221, 223 face each other in astate where they are positioned relative to each other.

Here, because, as has been explained already, the substrate holder 221held by the upper stage 322 is holding the substrate 211 on the holdingsurface 222 with a raised middle portion, the substrate 211 also israised at its middle portion. On the other hand, because the substrateholder 223 held by the lower stage 332 has the flat holding surface 224,the substrate 213 is held in a flat state. Accordingly, the intervalbetween the substrates 211, 213 facing each other in the bonding unit300 is narrow at their middle portions and increases as the distancefrom the circumferential portions decreases.

FIG. 11 shows operation performed by the bonding unit 300 to bring thesubstrate 213 held by the lower stage 332 into contact with thesubstrate 211 held by the upper stage 322 (Step S107 in FIG. 3 ). Thecontrol unit 150 operates the raising/lowering drive unit 338 to raisethe lower stage 332 to bring the substrates 211, 213 into contact witheach other.

FIG. 12 is a figure schematically showing how the substrates 211, 213appear at Step S107 to Step S108 shown in FIG. 10 . As illustrated,because the middle portion of the substrate 211 held by the upper stage322 is raised, if the lower stage 332 approaches the upper stage 322,first, the middle portions of the substrates 211, 213 contact eachother. Furthermore, by the control unit 150 continuing operation of theraising/lowering drive unit 338, the middle portions of the substrates211, 213 contact each other, and a bonding starting point is formedbetween the substrates 211, 213.

At this time, the substrate 211 is still held by the curved holdingsurface 222 of the substrate holder 221. Accordingly, at the moment whenthe middle portion of the substrate 211 abuts against the flat substrate213, circumferential portions of the substrate 211 are held by thesubstrate holder 221 and separated from the substrate 213. Stateddifferently, the substrate holder 221 keeps holding the substrate 211such that portions of the substrates 211, 213 other than their middleportions do not contact other other.

Preferably, before the above-mentioned bonding starting point is formed,a temperature difference is generated by temperature control or the liketo correct the substrates 211, 213. Thereby, a bonded substrate 230 inwhich the middle portions of the substrates 211, 213 are positionallyless shifted can be manufactured.

FIG. 13 is a figure showing the state of the substrates 211, 213 in aperiod following Step S107 shown in FIG. 3 . At Step S107, thesubstrates 211, 213 are pressed against each other at parts of theirmiddle portions in the plane direction. Thereby, a bonding startingpoint 231 at which the substrates 211, 213 are partially bonded isformed near the middle portions of the substrates 211, 213. However,because, as has been explained with reference to FIG. 12 , the substrate211 is still held by the substrate holder 221, the substrates 211, 213are not bonded yet in regions thereof away from their middle portions.

FIG. 14 is a partially enlarged view showing the state of the substrates211, 213 immediately before they contact each other during execution ofStep S107 (please see FIG. 3 ). The region shown in FIG. 14 correspondsto the region indicated with the dotted line B in FIG. 12 .

In the illustrated state, a gap G is left between the substrates 211,213. The gap G is formed by the internal atmosphere of the bonding unit300 or the like being sandwiched by the substrates 211, 213. Theatmosphere or the like sandwiched by the substrates is expelled by thebonding unit 300 continuously pressing the substrates 211, 213 againsteach other, and eventually the substrates 211, 213 closely contact eachother and are bonded together; however, lengths of time required forbonding of the substrates 211, 213 differ in some cases depending on thedensity of the atmosphere or the like.

In the bonding unit 300, parts of the substrates 211, 213 near theirmiddle portions optically communicate with the detector 341 through theobservation window 327 and observation hole 227 even in the state wherethe substrates 211, 213 are sandwiched by the upper stage 322 and thelower stage 332. In the illustrated example, the detector 341 has alight source 351 and a light-receiving unit 352.

The light source 351 generates irradiation light at a wavelength thatcan at least partially be transmitted through the substrate 211.Irradiation light generated by the light source 351 is radiated towardthe substrate 211 through the observation window 327 and observationhole 227. The light-receiving unit 352 has a photoelectric conversionelement such as a photodiode, and receives irradiation light reflectedon the substrates 211, 213 or the like to generate an electric signalcorresponding to the intensity of the reflected light. The electricsignal generated by the light-receiving unit 352 is input to the controlunit 150.

As indicated with alternate long and short dash lines in the figure,between the upper stage 322 and the lower stage 332, reflection surfacesare formed at boundaries between media with different refractiveindices. In the illustrated example, reflection surfaces P, Q, R, S areformed at: the boundary between the observation hole 227 and thesubstrate 211; the boundary between the substrate 211 and the gap G; theboundary between the gap G and the substrate 213; and the boundarybetween the substrate 213 and the substrate holder 221, respectively.Accordingly, irradiation light radiated from the light source 351 of thedetector 341 through the observation window 327 and observation hole 227is reflected on each of the reflection surfaces P, Q, R, S, and theintensity of the reflected light is detected at the light-receiving unit352 of the detector 341.

FIG. 15 shows the state where the middle portions of the substrates 211,213 are bonded after Step S107, from the point of view which is the sameas that in FIG. 14 . If the substrates 211, 213 are bonded and closelycontact each other, a pair of the reflection surfaces R, Q formedbetween the substrates 211, 213 and the gap G disappears. Because ofthis, the number of reflection surfaces to reflect irradiation lightfrom the detector 341 decreases, and the reflected light intensitydetected by the detector 341 changes. That is, depending on the size ofthe gap G, the overall reflectance of light from the substrates 211, 213changes, and for example the larger the size of the gap G is, the higherthe reflectance is. The reflected light intensity is one piece ofinformation about the state of enlargement of the contact regions, andsuch information may be the luminance (cd/m²) of reflected light or maybe the luminous intensity (lm·s) of reflected light. Accordingly, thecontrol unit 150 having received an output of the detector 341 candetermine that contacting portions of the substrates 211, 213, that is,the bonding starting point 231 is formed between the substrates 211, 213if it detects that the reflected light intensity has become constant orthat the rate of changes in the reflected light intensity has becomelower than a predetermined value. That is, the control unit 150determines that the contacting state of the contact regions is the statewhere the starting point 231 is formed. Accordingly, the control unit150 can form a determining unit that determines whether or not thesubstrates 211, 213 have been bonded together.

Upon determining that the bonding starting point 231 has been formed,the control unit 150 may discontinue holding of the substrate 211 (StepS109 in FIG. 3 ). With this series of control, the bonding startingpoint 231 is surely formed between the substrates 211, 213 and holdingof the substrate 211 can be discontinued without wasteful waiting timeis spent after the bonding starting point 231 is formed. Accordingly, inmanufacturing of the bonded substrates 230, the yield is improved andthe throughput is also increased.

In FIG. 14 and FIG. 15 , irradiation light is illustrated as if it isradiated at an angle relative to the substrates 211, 213, for thepurpose of facilitating distinction between the irradiation light andreflected light in the figures. But even if irradiation light isradiated vertically to the substrates 211, 213, an optical system todetect the reflected light intensity can be formed by using an opticaldevice such as a half mirror. In addition, the detector 341 may also usean image sensor such as a CCD or a CMOS sensor, instead of thelight-receiving unit 352. In addition, the above-mentioned structure ofthe detector 341 can also be applied to the other detectors 342, 343shown in FIG. 6 or other figures.

FIG. 16 is a schematic plan view showing the state of the substrates211, 213 during a period following Step S109 (please see FIG. 3 ). Inaddition, FIG. 17 is a schematic longitudinal sectional view of thesubstrates 211, 213 in the state shown in FIG. 16 .

At Step S109, holding by the substrate holder 221 held by the upperstage 322 is discontinued, and the substrate 211 is released. Because afront surface(s) of at least one of the substrates 211, 213 isactivated, a part thereof closely contact to form a bonding startingpoint, and if one of the substrates 211, 213 is released from holding bythe substrate holder 221 or 223, adjacent regions are autonomouslyadsorbed to each other and bonded together due to intermolecular forcebetween the substrates 211, 213. The contact regions of the substrates211, 213 sequentially expand to adjacent regions along with the passageof time.

Thereby, a bonding wave 232, which is the boundary between contactregions which are regions where the substrates 211, 213 are bondedtogether and non-contact regions which are regions where they are notbonded together yet, moves in each radial direction from inner portionsof the substrates 211, 213 to their outer portions, and bonding of thesubstrates 211, 213 progresses. That is, along with movement of thebonding wave, the contact regions enlarge. However, in a region outsidethe region surrounded by the bonding wave 232, the substrates 211, 213are not bonded together yet.

Here, as has been explained already, the substrate holder 221 held bythe upper stage 322 of the bonding unit 300 also has the observationhole 228 at the intermediate position between the center of thesubstrate 211 that it holds and its circumference. In addition, theupper stage of the bonding unit 300 has the observation window 328 anddetector 342 at positions corresponding to the position of theobservation hole 228 when the substrate holder 221 is being held by theupper stage.

Accordingly, if the substrates 211, 213 are bonded together in thebonding unit 300, it can be determined, also at the position of theobservation hole 228, whether or not the substrates 211, 213 are bondedtogether. The same structure as that of the detector 341 disposed at thecentral portions of the substrates 211, 213 can be used for the detector342, but this is not the sole example.

If, after it is detected at Step S108 that the bonding starting point231 is formed between the centers of the substrates 211, 213, bonding ofthe substrates 211, 213 is detected through the observation hole 228, asStep S110, the control unit 150 can determine that the contact regionsof the substrates 211, 213 have enlarged to the intermediate portionbetween the centers of the substrates 211, 213 and their circumference(Step S110: YES). That is, it is determined that the bonding wave hasreached an intermediate position which is a predetermined position. Theposition of the bonding wave is one piece of information about the stateof enlargement of the contact regions. Thereby, the control unit 150 canproceed to Step S112 of the control procedure.

Furthermore, the substrate holder 221 also has the observation hole 229at the circumference of the substrate 211 that it holds. In addition,the upper stage of the bonding unit 300 has the observation window 329and detector 343 at positions corresponding to the position of theobservation hole 229 when the substrate holder 221 is being held by theupper stage.

Accordingly, if the substrates 211, 213 are bonded together in thebonding unit 300, it can be determined, also at the position of theobservation hole 229, whether or not the substrates 211, 213 are bondedtogether.

In the state shown in FIG. 16 and FIG. 17 , the substrates 211, 213 arebonded together at the position of the observation hole 228, but are notbonded together yet at the position of the observation hole 229.Accordingly, the control unit 150 can determine that although thebonding wave 232 has been enlarging, and bonding of the substrates 211,213 is progressing, the entire substrates 211, 213 have not been bondedtogether yet.

FIG. 18 is a schematic plan view showing the state of the substrates211, 213 at the moment when the control unit 150 determines at Step S112(please see FIG. 3 ) that bonding of the substrates 211, 213 has beencompleted (Step S112: YES). In addition, FIG. 19 is a schematiclongitudinal sectional view of the substrates 211, 213 in the stateshown in FIG. 18 .

At Step S110, the control unit 150 confirmed that bonding of thesubstrates 211, 213 is progressing, through the observation hole 228,observation window 328 and detector 342. If bonding of the substrates211, 213 proceeds further and the bonding wave 232 reaches thecircumference of the substrates 211, 213, the contact regions spread tothe entire substrates 211, 213. Thereby, the substrates 211, 213 arebonded together to form the bonded substrate 230.

As has been explained already, the substrate holder 221 held by theupper stage 322 of the bonding unit 300 also has the observation hole229 at a position of the circumference of the substrate 211 that itholds. In addition, the upper stage of the bonding unit 300 has theobservation window 329 and detector 343 at positions corresponding tothe position of the observation hole 229 when the substrate holder 221is being held by the upper stage.

Accordingly, if the substrates 211, 213 are bonded together in thebonding unit 300, it can be determined, also at the position of theobservation hole 229, whether or not the substrates 211, 213 are bondedtogether.

In the bonding unit 300, after enlargement of the contact regions of thesubstrates 211, 213 that are surrounded by the bonding wave 232 which isthe boundary between the contact regions and the non-contact regions isdetected at Step S110 (Step S110: YES), it can be detected through theobservation hole 229 whether or not the bonding wave has reached theouter edges of the substrates 211, 213, that is, whether or not thebonding is completed (Step S112). The same structure as that of thedetector 341 disposed at the central portions of the substrates 211, 213can be used for the detector 342, but this is not the sole example. Inparticular, the circumferential portions of the substrates 211, 213 areexposed to the outside even after the substrates 211, 213 are bondedtogether. Accordingly, the detector 343 to detect bonding at thecircumferential portions of the substrates 211, 213 can also have astructure different from those of the other detectors 341, 342.

In this manner in the bonding unit 300, enlargement of the contactregions of the substrates 211, 213 progresses from the middle portionsof the substrates 211, 213 toward their outer edges. Because of this,the atmosphere that was sandwiched between the substrates 211, 213 atthe stage before bonding, for example, the atmospheric air, is expelledfrom inner portions of the substrates 211, 213 toward their outerportions in the course of expansion of the area of the contact regionsof the substrates 211, 213, and it is possible to prevent bubbles frombeing left between the bonded substrates 211, 213.

In order to expel bubbles or the like from between the substrates 211,213 smoothly in the course of placing the substrates 211, 213 one uponanother, preferably, at the moment when the substrates 211, 213 startcontacting each other, there is a sufficient space between thesubstrates 211, 213 that does inhibit movement of bubbles, and acontinuous clearance is formed at the circumference of the substrates211, 213. Accordingly, a procedure for deformation of the substrate 211by adsorption to the substrate holder 221 with the curved holdingsurface 222 is preferably selected such that a certain degree ofcurvature remains in the stage of causing the substrate 211 to contactthe substrate 213 at Step S107 (FIG. 3 ). In addition, if it ispredicted that the degree of the curvature of the substrate 211 lowersat the stage of placing the substrates 211, 213 one upon another, asubstrate holder 223 with a curved holding surface 224 like thesubstrate holder 221 may also be used as the substrate holder 223 tohold the substrate 213 held by the lower stage 332, for the purpose ofensuring a gap for passage of bubbles.

In addition, in the above-mentioned example, holding of the substrate211 held by the upper stage 322 is discontinued at Step S109. But at thestep, holding by the lower stage 332 may be discontinued, or holding ofthe substrates 211, 213 may be discontinued at both the stages.

However, the substrate 211 holding of which has been discontinued isinevitably subjected also to discontinuation of correction of distortiondue to adsorption by the substrate holder 221. Accordingly, if holdingof a substrate is to be discontinued at Step S109, holding of one of thesubstrates 211, 213 that is relatively less deformed and whosecorrection amount is smaller is preferably discontinued.

FIG. 20 is a schematic view showing an example of another structure ofthe detector 341 in the bonding unit 300. FIG. 20 is depicted from thepoint of view which is the same as those in FIG. 14 and FIG. 15 .

In the bonding unit 300, the illustrated detector 341 has a displacementgauge 353. The displacement gauge 353 has a relative position fixed tothe upper stage 322, and detects displacement of the substrates 211, 213or the like as a measurement target object based on changes in opticalcharacteristics. Various types of gauges can be used as the opticaldisplacement gauge 353, and examples thereof include triangulation-typegauges, laser focus-type gauges, spectral interference-type gauges orthe like.

The illustrated detector 341 brings the substrate 211, which is locatedon the upper side in the figure, and the substrate 213, which is locatedon the lower side in the figure, close to each other at Step S107(please see FIG. 3 ) while continuously measuring the relative intervalH₁ between the upper surface of the substrate 211 and the upper surfaceof the substrate 213, and eventually press them against each other. Inthe course of these processes, if the value of the interval H₁ becomesequal to the known thickness T₁ of the upper substrate 211, it isdetected that the substrates 211, 213 are in contact with each other andbonded together with no clearance therebetween. In this manner, by usingthe displacement gauge 353 as the detector 341, the control unit 150 cancontinuously observe bonding of the substrates 211, 213 and reflect aresult of the observation in the control of the bonding unit 300. Thevalue of the interval H₁ is one piece of information about the state ofenlargement of the contact regions.

FIG. 21 shows the same structure as that of the bonding unit 300 shownin FIG. but a target of measurement by the displacement gauge 353 as thedetector 341 is different. In the illustrated bonding unit 300, thedisplacement gauge 353 measures the interval H₂ between the position ofthe upper surface of the substrate 211 on the upper side in the figureand the position of the lower surface of the substrate 213 on the lowerside in the figure or position of the upper surface of the substrateholder 221 on the lower side in the figure. Then, at Step S107 (pleasesee FIG. 3 ), the substrates 211, 213 are brought close to each otherand eventually pressed against each other. In the course of theseprocesses, if the value of the interval H₂ becomes equal to the total ofthe known thickness T₁ of the substrate 211 and the known thickness T₂of the substrate 213, it can be detected that the substrates 211, 213are brought into contact with each other and bonded together with noclearance therebetween.

FIG. 22 shows the same structure as that of the bonding unit 300 shownin FIG. and FIG. 21 , but a target of measurement by the displacementgauge 353 as the detector 341 is different. In the illustrated bondingunit 300, the displacement gauge 353 measures the thickness T₃ of thegap G between the substrate 211 on the upper side in the figure and thesubstrate 213 on the lower side in the figure based on the position ofthe lower surface of the substrate 211 and the position of the uppersurface of the substrate 213. Then, at Step S107 (please see FIG. 3 ),the substrates 211, 213 are brought close to each other and eventuallypressed against each other. In the course of these processes, if thevalue of the thickness T₃ became zero, it can be detected that thesubstrates 211, 213 are brought into contact with each other and bondedtogether with no clearance therebetween.

Like the detectors 341, 342, 343, displacement gauges 353 may bearranged respectively at central portions, intermediate portions andcircumferential portions of the substrates 211, 213 to detect theposition of the boundary of the contact regions at each position. Inthis case, the control unit 150 determines that formation of thestarting point 231 is completed if it detects contact at the centralportions, and determines that bonding is completed if it detects contactat the circumferential portions.

As shown in FIG. 20 , FIG. 21 and FIG. 22 , there are a plurality oftargets of measurement by the displacement gauge 353 as the detector 341at the observing unit 344. Accordingly, the detection accuracy of thedetector 341 may be improved by measuring, in parallel, two selectedones among a plurality of detection targets, for example, the detectiontargets shown in FIG. 20 , FIG. 21 and FIG. 22 .

In addition, although in the above-mentioned example explained, anoptical displacement gauge is used, there are multiple types of knowndisplacement gauges that use other schemes such as eddy current-typegauges, ultrasonic wave-type gauges or contact-type gauges. Naturally,displacement gauges using schemes other than these schemes may also beused. In addition, displacement gauges using different schemes may bemixed into the plurality of detectors 341, 342, 343 forming theobserving unit 344. In addition, a displacement amount of the uppersurface of the substrate 213, that is, a distance between the uppersurface of substrate 213 and the holding surface of the substrate holder223 while enlargement of the contact regions is progressing relative tothe state where the upper substrate 213 is being held by the substrateholder 223 may be measured by the displacement gauge 353. The value ofthis distance is one piece of information about the state of enlargementof the contact regions. In this case, the control unit 150 may determinethat bonding is completed when displacement of the upper surface of thesubstrate 213 became 0 and the displacement amount became constant, orwhen the change amount became smaller than a predetermined value.

FIG. 23 is a schematic view of an observing unit 345 having anotherstructure. In the bonding unit 300 having the observing unit 345,similar to the observing unit 344 shown up to FIG. 22 , the observationwindows 327, 328, 329 are provided to the upper stage 322, and theobservation holes 227, 228, 229 are provided to the substrate holder 221held by the upper stage.

Furthermore, in the bonding unit 300 having the observing unit 345, theobservation windows 327, 328, 329 are provided also to the lower stage332. In addition, the observation holes 227, 228, 229 are provided alsoto the flat substrate holder 223 held by the lower stage 332.

Still furthermore, in the observing unit 345, the light source 351irradiates the substrates 211, 213 with irradiation light through theobservation windows 327, 328, 329 of the upper stage 322 and theobservation holes 227, 228, 229 of the substrate holder 221 on the upperside in the figure; on the other hand, the light-receiving unit 352receives the irradiation light through the observation windows 327, 328,329 of the lower stage 332 and the observation holes 227, 228, 229 ofthe substrate holder 223 on the lower side in the figure. With such astructure, the light-receiving unit 352 may observe the state of bondingof the substrates 211, 213 based on the light amount of the irradiationlight that is transmitted through the substrates 211, 213. The lightamount of the irradiation light is one piece of information about thestate of enlargement of the contact regions. By preliminarilyexperimentally determining a light amount that is observed whenformation of the starting point 231 is completed and a light amount thatis observed when bonding is completed, the control unit 150 determinesthat formation of the starting point 231 is completed and bonding iscompleted based on that an amount detected by the observing unit 345became the preliminarily determined values.

In the examples shown in FIG. 4 to FIG. 23 , the speed of progress ofthe bonding wave, that is, the speed of enlargement of the contactregions may be predicted and the moment when bonding will be completedmay be predicted based on a length of time from when the detector 341detects completion of starting point formation until when the detector342 detects the boundary of the contact regions or a length of time fromwhen the detector 342 detects the boundary until when the detector 343detects the boundary.

In addition, although in an example shown, the three detectors 341, 342,343 are arranged at central portions, intermediate portions andcircumferential portions of the substrates 211, 213, instead of this orin addition to this, a plurality of detectors may be arranged such thatthe circumference of a substrate among the two substrates 211, 213 whichis fixed and is not released from a stage at the time of bonding can beobserved. In this case, it is determined that bonding is completed whencircumferential portions of a released substrate are detected by all ofthe plurality of detectors. In addition, the situation of progress ofthe bonding wave can be known based on timing at which thecircumferential portions of a substrate are detected by the plurality ofdetectors. That is, if timing of detection by one detector is differentfrom timing of detection by other detectors, it can be known that theprogress of the bonding wave is slow at a region including acircumferential portion, detection timing of which is late. In thiscase, the control unit 150 gives an apparatus feedback, instructing tospeed up the progress of the region where the progress of the bondingwave is slow.

FIG. 24 is a schematic view showing another structure of the detector343 in the bonding unit 300. As has been explained already,circumferential portions of the substrates 211, 213 are exposed to theoutside even after the substrates 211, 213 are bonded together.Accordingly, the detector 343 to detect bonding at the circumferentialportions of the substrates 211, 213 can also have a structure differentfrom those of the other detectors 341, 342.

The illustrated detector 343 has the light source 351, thelight-receiving unit 352 and an optical fiber 354. The light source 351radiates irradiation light toward circumferential end portions of thesubstrates 211, 213 through the observation window 329 and observationhole 229. The optical fiber 354 has one end disposed near an end portionof the substrate 213 held by the lower stage 332. Thereby, the opticalfiber 354 receives irradiation light scattered by a circumferential endportion of the substrate 213.

The other end of the optical fiber 354 is disposed to face thelight-receiving unit 352. Thereby, irradiation light having entered theoptical fiber 354 enters the light-receiving unit 352. Upon receivingthe irradiation light, the light-receiving unit 352 generates anelectric signal and inputs it to the control unit 150. The electricsignal input from the light-receiving unit 352 to the control unit 150is one piece of information about the state of enlargement of thecontact regions.

FIG. 25 is a schematic view for explaining operation of the detector 343shown in FIG. 24 . If the substrates 211, 213 are bonded together up totheir circumferential end portions in the bonding unit 300, irradiationlight radiated by the light source 351 is radiated onto and scattered bythe substrate 211, instead of the substrate 213. Because of this, theoptical fiber 354 disposed laterally next to the substrate 213 no longerreceives irradiation light. Thereby, because an electric signal inputfrom the light-receiving unit 352 to the control unit 150 changes, thecontrol unit 150 can determine that the substrate 211 is bonded to thesubstrate 213 up to their circumference.

FIG. 26 is a schematic view of an observing unit 346 having stillanother structure. The observing unit 346 has a plurality of lightsources 361, 362, 363 and a plurality of light-receiving units 371, 372,373.

The light-receiving units 371, 372, 373 are disposed to face the lightsources 361, 362, 363 with the substrates 211, 213 being sandwichedtherebetween in the plane direction of the substrates 211, 213. One ofthe light-receiving units, the light-receiving unit 371, is disposed ata position at which it faces one of the light sources, the light source361, with the centers of the substrates 211, 213 being sandwichedtherebetween. Another one of the light-receiving units, thelight-receiving unit 373, is disposed at a position where it facesanother one of the light sources, the light source 363, with a regionincluding the circumference of the substrates 211, 213 being sandwichedtherebetween. Still another one of the light-receiving units, thelight-receiving unit 372, is disposed at a position at which it facesthe light source 362 disposed between the light sources 361, 362.

FIG. 27 is a schematic view for explaining operation of the observingunit 346 shown in FIG. 26 . FIG. 27 shows how the substrates 211, 213,which are being observed by the observing unit 346, appear from the sidewhere the light-receiving unit 371, 372, 373 at lateral sides of thesubstrates 211, 213 in the plane direction are located.

The illustrated substrates 211, 213 are in the state shown in FIG. 17where the upper substrate 211 is released from the upper stage 322 (StepS109 in FIG. 3 ) and bonding has already progressed. Because of this,when seen from the side on which the light-receiving units 371, 372 arelocated, the width of a luminous flux of irradiation light radiated bythe light sources 361, 362 onto the substrates becomes thin by beingblocked by the substrates 211, 213 bonded together. Accordingly, thelight-receiving units 371, 372 input, to the control unit 150, electricsignals corresponding to reception of small amounts of irradiationlight. The electric signals input from the light-receiving units 371,372 to the control unit 150 are one piece of information about the stateof enlargement of the contact regions. By starting receiving light atthe light-receiving unit 371 before the two substrates 211, 213 contacteach other and detecting changes in the reception light amount, it maybe determined that a starting point is formed when the rate of thechanges became zero and the value of the light amount stayed constantuntil a predetermined length of time passes, or when the rate of thechanges became lower than a predetermined value. Also about thelight-receiving unit 372, it may be determined, by detecting changes inthe reception light amount, that the bonding wave expanded from thebonding starting point 231 has reached an intermediate point between thecenters of the substrates 211, 213 and their circumferential portionswhen the rate of the changes became zero and the value of the lightamount stayed constant until a predetermined length of time passes orwhen the rate of the changes has become lower than a predeterminedvalue.

In contrast to this, in the illustrated state, the circumference of thesubstrates 211, 213 is not bonded yet. Because of this, light radiatedby the light source 363 onto the substrates 211, 213 passes throughbetween the substrates 211, 213 and received by the light-receiving unit372 at a wide luminous flux width. Accordingly, the light-receivingunits 371, 372 input, to the control unit 150, electric signalscorresponding to reception of strong irradiation light.

In this manner, the observing unit 346 can detect that the bondingstarting point 231 is formed between the centers of the substrates 211,213 based on an output from the light-receiving unit 371. In addition,the observing unit 346 can detect that bonding of the substrates 211,213 is expanding from the centers toward their circumference based on anoutput from the light-receiving unit 372. Furthermore, the observingunit 346 can determine that bonding of the substrates 211, 213 iscompleted up to their circumferential portions if it detects, based onan output from the light-receiving unit 373, that the rate of thechanges became zero and the value of the light amount stayed constantuntil a predetermined length of time passes or that the rate of thechanges became lower than a predetermined value.

Front surfaces of the substrates 211, 213 are not necessarily flat dueto the circuit regions 216 or the like. In addition, the substrates 211,213 themselves are deformed (e.g., warped) due to a process of formingthe circuit regions 216, in some cases. Furthermore, in the bonding unit300, the substrates 211, 213 to be bonded are deformed to correct themagnifications, distortion or the like of the substrates 211, 213, insome cases. Because of this, between the substrates 211, 213, a gapwhere light can advance linearly from the light sources 361, 362, 363 tothe light-receiving unit 371, 372, 373 is not formed in some cases.

But if a gap between the substrates 211, 213 is continuous from thelight sources 361, 362, 363 to the light-receiving units 371, 372, 373,a part of irradiation light reaches the light-receiving units 371, 372,373. Accordingly, even if a gap between the substrates 211, 213 is notthe one in which sightlines from the light-receiving units 371, 372, 373to the light sources 361, 362, 363 can be ensured, the observing unit346 can detect whether or not the substrates 211, 213 are bondedtogether.

In addition, irradiation light generated by the light source 351, 361,362, 363 at the observing units 344, 345, 346 or the like may bemodulated at a predetermined frequency, and the irradiation light may belock-in detected at the light-receiving units 352, 371, 372, 373.Thereby, faint irradiation light can be detected accurately excludinginfluence of background light.

FIG. 28 is a schematic view of an observing unit 347 having stillanother structure. The observing unit 347 has the light sources 361, animage-capturing unit 374 and a background board 364.

The light source 361 and image-capturing unit 374 are disposed laterallynext to the substrates 211, 213 in the plane direction of the substrates211, 213, and on the side where the substrates 211, 213 are located.Illumination light generated by the light sources 361 is radiated fromthe side where the image-capturing unit 374 is located toward thesubstrates 211, 213, and illuminates the image-capturing field of viewof the image-capturing unit 374.

The background board 364 is disposed on the side, relative to the lightsource 361 and image-capturing unit 374, that is opposite to the sidewhere the substrates 211, 213 are located. Thereby, if theimage-capturing unit 374 captures an image of the substrates 211, 213,the background board 364 forms the background of the substrates 211,213. The background board 364 has a color and luminosity that have ahigh contrast against an image of the substrates 211, 213 captured bythe image-capturing unit 374.

At the observing unit 347, the image-capturing field of view of theimage-capturing unit 374 spreads from the centers of the substrates 211,213 to their circumference as indicated by dotted lines in the figure.Thereby, at the observing unit 347, the role of the light-receivingunits 371, 372, 373 of the observing unit 346 shown in FIG. 26 and FIG.27 is played collectively by the image-capturing unit 374. A videocaptured by the image-capturing unit 374 is acquired by the control unit150 and is subjected to image processing.

If the upper stage 322 and lower stage 332 holding the substrates 211,213, respectively, in the bonding unit 300 came to positions where theyface each other, the image-capturing unit 374 captures an image of thebackground board 364 seen through between the substrates 211, 213. Ifthe substrates 211, 213 formed the bonding starting point 231 at StepS108 (please see FIG. 3 ), a part of the image of the background board364 in the image captured by the image-capturing unit 374 is blocked anddivided by the substrates 211, 213. Thereby, the control unit 150 candetect that the bonding starting point 231 has been formed.

Subsequently, the image-capturing unit 374 can continuously monitor howenlargement of the contact regions of the substrates 211, 213 appears atStep S110. Furthermore, at Step S112, the image-capturing unit 374 candetect that the contact regions of the substrates 211, 213 have reachedthe circumference of the substrates and bonding is completed. In thismanner, the observing unit 347 can directly capture an image showing howbonding of the substrates 211, 213 appears and continuously detect thebonding based on the distance between the substrates 211, 213 in thecaptured image.

In the above-mentioned example, the image-capturing unit 374 is arrangedlaterally next to the substrates 211, 213 in the plane direction todetect bonding. But for example, the image-capturing unit 374 may be onethat is sensitive to light at a wavelength that is transmitted throughat least one of the upper stage 322 and the lower stage 332 and thesubstrate holder 221 or 223 held by the at least one stage, and theimage-capturing unit 374 may be arranged laterally next to thesubstrates 211, 213 in their thickness direction to detect bonding.

In addition, an image acquired by the image-capturing unit 374 is notlimited to an image obtained by directly capturing the shapes of thesubstrates 211, 213. For example, the state of bonding of the substrates211, 213 may be detected based on changes in an image of interferencefringes generated by optical phenomena such as interference occurringbetween the substrates 211, 213 or the like.

FIG. 29 is a schematic view of the bonding unit 300 including anobserving unit 348 having another structure. The illustrated bondingunit 300 has the same structure as that of the bonding unit 300 shown inFIG. 6 or other figures, except for a portion explained next.Accordingly, common constituent elements are given the same referencenumbers, and the same explanation is not repeated.

The structure of the illustrated bonding unit 300 is different from thatof the bonding unit 300 shown in FIG. 6 in that it has the observingunit 348 having a load cell 380, in place of the observing unit 344 toobserve the state of bonding optically. The load cell 380 is disposedbetween the top plate 316 of the frame body 310 and the upper stage 322.

Thereby, if the substrates 211, 213 are pressed against each other bythe lower stage 332 being raised by the raising/lowering drive unit 338,the observing unit 348 can continuously detect reaction force that theupper stage 322 receives from the substrates 211, 213 using the loadcell 380. That is, the load cell 380 first detects increase in thereaction force if the substrates 211, 213 that are pressed against eachother at Step S107 (please see FIG. 3 ) contacted each other and formedthe bonding starting point 231. The reaction force detected by the loadcell 380 is one piece of information about the state of enlargement ofthe contact regions and is conveyed to the control unit 150. When thereaction force reaches a preliminarily determined value or if it remainsequal to or higher than a predetermined value for a threshold length oftime, the control unit 150 can determine that the bonding starting point231 is formed between the substrates 211, 213 (Step S108: YES).

In addition, when the starting point 231 is to be formed, a part of thesubstrate 213 is pressed against a part of the substrate 211 through theatmosphere or the like sandwiched between the substrates 211, 213, andthe atmosphere or the like is expelled, and thereafter the substrates211, 213 directly contact each other. Because of this, the reactionforce detected by the load cell 380 becomes small temporarily when theatmosphere is expelled. The control unit 150 may determine that thebonding starting point 231 is formed between the substrates 211, 213 ifit detects that the value of the load cell 380 became small temporarilyor it detects that the value of the load cell 380 became smalltemporarily and thereafter became large again to exceed a predeterminedvalue.

Thereafter, if the entire substrates 211, 213 are bonded together, forceof the raising/lowering drive unit 338 to raise the lower stage 332 isdirectly applied to the load cell 380. Accordingly, the control unit 150can determine that the entire substrates 211, 213 are bonded togetherbased on that the reaction force detected by the load cell 380 of theobserving unit 348 is increasing.

In this manner, the state of bonding of the substrates 211, 213 can alsobe detected based on changes in mechanical characteristics. Thestructure of the observing unit 348 to perform detection based onmechanical characteristics is not limited to the one mentioned above.The reaction force of the substrates 211, 213 may be detected based onchanges in the driving power corresponding to changes in the drivingload of the raising/lowering drive unit 338, changes in the pressure ofworking fluid, or the like. If completion of bonding is determined basedon detection of the driving load of the raising/lowering drive unit 338,the load of the substrate 211 is applied to the lower stage 332 alongwith enlargement of the contact regions of the substrates 211, 213 whenthe upper substrate 211 is being stacked on the lower substrate 213 asin the illustrate example; therefore, the thrust of the raising/loweringdrive unit 338 increases. The control unit 150 determines that bondingis completed if it detects that changes in this thrust are no longerobserved, the load value became constant, and the load value remainedconstant for a threshold length of time or that the rate of changes inthe thrust became lower than a predetermined value.

In addition, the observing unit 348 can be formed also by using amechanical displacement gauge having a contactor that is brought intocontact if circumferential portions of the substrate 211 released fromholding of the upper stage 322 at Step S109 are displaced to a positionwhere they contact the fixed substrate 213.

FIG. 30 is a schematic view of the bonding unit 300 including anobserving unit 349 having another structure. The illustrated bondingunit 300 has the same structure as that of the bonding unit 300 shown inFIG. 6 or other figures, except for a portion explained next.Accordingly, common constituent elements are given the same referencenumbers, and the same explanation is not repeated.

The structure of the illustrated bonding unit 300 is different from thatof the bonding unit 300 shown in FIG. 6 in that it has the observingunit 349 having a microphone 390, in place of the observing unit 344 todetect the state of bonding optically. The microphone 390 is suspendedfrom the top plate 316 of the frame body 310 to detect elastic wavesgenerated between the upper stage 322 and the lower stage 332.

In the bonding unit 300, the substrates 211, 213 generate elastic wavesin the course of bonding. For example, the substrate 211 held by theupper stage 322 is warped as it is held by the substrate holder 221having the curved holding surface 222 until it is released at Step S109(please see FIG. 3 ). On the other hand, upon being released at StepS109, the substrate 211 deforms into a shape conforming to the othersubstrate 213 along with the progress of bonding.

Along with this deformation, the substrate 211 generates very smallelastic waves. Accordingly, the control unit 150 can determine thatbonding is progressing between the substrates 211, 213 by acquiringelectric signals based on sound detected by the microphone 390.

In addition, in the course of bonding of the substrates 211, 213, theatmosphere initially sandwiched between the substrates 211, 213 isexpelled from between the substrates 211, 213. Along with this movement,vibration generated by the atmosphere can also be detected as acousticelastic waves. Accordingly, continuation and end of bonding can bedetected by detecting elastic waves generated by the atmosphere usingthe microphone 390.

Furthermore, if bonding of the substrates 211, 213 reached thecircumference of the substrates 211, 213, the circumference of one ofthe substrates, the substrate 211, abuts against the other substrates,the substrate 213, and this abruptly stops displacement of the substrate211 that had been continuing until then. Thereby, so-called collisionsound is generated between the substrates 211, 213. Accordingly, thecontrol unit 150 can determine that bonding of the substrates 211, 213reached their circumference and is completed, by acquiring an electricsignal generated by the microphone 390 that detected the collisionsound.

Elastic waves generated by the substrate 211 are not limited to ones ata frequency in the audible band. Accordingly, the microphone 390 used atthe observing unit 349 preferably is sensitive also to frequenciesoutside the audible band.

FIG. 31 is a schematic view of the bonding unit 300 including anobserving unit 610 having another structure. The illustrated bondingunit 300 has the same structure as that of the bonding unit 300 shown inFIG. 30 , except for a portion explained next. Accordingly, commonconstituent elements are given the same reference numbers, and the sameexplanation is not repeated.

In the illustrated bonding unit 300, the observing unit 610 has avibration generating unit 391 and a vibration detecting unit 392, inplace of the microphone 390. The vibration generating unit 391 isdisposed in the upper stage 322, and generates vibration at apredetermined frequency. If the vibration generating unit 391 generatesvibration, the generated vibration is conveyed to the substrate 211through the upper stage 322 and substrate holder 221. The vibrationgenerating unit 391 can be formed of a piezoelectric element or thelike.

The vibration detecting unit 392 is disposed in the lower stage 332, anddetects vibration conveyed from the substrate 211 through the substrate213 and substrate holder 221 to the lower stage 332. Accordingly, untilthe substrates 211, 213 are pressed against each other at Step S107(please see FIG. 3 ), the vibration detecting unit 392 does not detectvibration even if the vibration generating unit 391 generates thevibration. But if the substrates 211, 213 contact each other at StepS107, the vibration detecting unit 392 can detect vibration generated bythe vibration generating unit 391.

In addition, even after the substrates 211, 213 contact each other atStep S107, the acoustic impedance of the vibration system formed of theupper stage 322, substrate holders 221, 223, substrates 211, 213 andlower stage 332 changes corresponding to changes in the contacting stateof the substrates 211, 213. Accordingly, a result of detection by thevibration detecting unit 392 in a case where the vibration generatingunit 391 generates vibration also changes. Thereby, the progress andcompletion of bonding between the substrates 211, 213 can be detected bythe vibration detecting unit 392.

FIG. 32 is a schematic view of the bonding unit 300 including anobserving unit 620 having still another structure. The illustratedbonding unit 300 has the same structure as that of the bonding unit 300shown in FIG. 6 or other figures, except for a portion explained next.Accordingly, common constituent elements are given the same referencenumbers, and the same explanation is not repeated.

In the illustrated bonding unit 300, the observing unit 620 has acapacitance detecting unit 621. The capacitance detecting unit 621applies a periodically changing electric signal to an LC resonantcircuit formed to include capacitance between the substrates 211, 213 toserve as a measurement target and a standard inductor. At this time, thecapacitance detecting unit 621 superimposes an AC voltage to a DCvoltage applied to electrodes of the two substrate holders 221, 223having the function as electrostatic chucks, and detects AC componentsin an electric signal that change corresponding to changes in thecapacitance at the substrates 211, 213. The value of the capacitance andthe value of the rate of changes that are detected by the capacitancedetecting unit 621 are one piece of information about the state ofenlargement of the contact regions.

The overall capacitance between the two substrate holders 221, 232 isthe composite of capacitance between an electrode of the substrateholder 221 and the substrate 211, capacitance between a silicon layer ofthe substrate 211 and an oxide film layer at its front surface,capacitance between the two substrates 211, 213, capacitance between asilicon layer of the substrate 213 and its oxide film layer andcapacitance between an electrode of the substrate holder 223 and thesubstrate 213.

The value of capacitance between the substrates 211, 213 increases asthe interval between the substrates 211, 213 narrows, and if parts ofthe substrates 211, 213 contact each other, it becomes the highest, andthe value of the overall capacitance also becomes the highest. That is,it shows the highest value when a starting point is formed between thesubstrates 211, 213. Thereafter, because the interval between thesubstrate 211 and an electrode of the substrate holder 221 widens alongwith the progress of the bonding wave, the overall capacitancedecreases.

In this manner, the capacitance changes corresponding to changes in thestate of bonding of the substrates 211, 213. The state of bonding of thesubstrates 211, 213 is electrically detected by detecting the changes.

The control unit 150 determines that a starting point is formed betweenthe substrates 211, 213 if it detects that the value of the capacitanceexceeded a threshold or it became a value preliminarily determined asthe highest value. Alternatively, the control unit 150 may determinethat a starting point is formed if it detects that a predeterminedlength of time has passed after the value of the capacitance exceeded athreshold or after it became a value preliminarily determined as thehighest value. The predetermined length of time is decided according tothe strength of joining between contacting parts of the substrates 211,213, and for example is set based on activation conditions of thesubstrates 211, 213. Alternatively, the control unit 150 may determinethat a starting point is formed if it detects that the size of the areaof contact between contacting parts of the substrates 211, 213 became apredetermined size. The predetermined size of the area is decidedaccording to the strength of joining between the parts of the substrates211, 213, or may be determined preliminarily experimentally. The size ofthe area can be detected based on changes in the capacitance that areobserved when the contact regions enlarge minutely after the substrates211, 213 contact each other at one point or by capturing an image fromthe outside by means like the one shown in FIG. 28 .

In addition, the control unit 150 determines that bonding is completedif it detects that the value of the capacitance became constant, and theload value remained constant for a threshold length of time or that therate of changes in the capacitance became lower than a predeterminedvalue. Alternatively, the control unit 150 may determine that bonding iscompleted if it detects that the value of the overall capacitance hasreturned to its value that was observed before the substrates 211, 213contact each other.

As mentioned above, in the bonding unit 300, changes in the state ofbonding can be detected based on changes in various characteristics suchas optical characteristics, mechanical characteristics, electricalcharacteristics or the like of the substrates 211, 213. Furthermore, thebonding unit 300 may be formed by combining multiple ones among theabove-mentioned various observing units 344, 345, 346, 347, 348, 349,610, 620.

FIG. 33 is a partially enlarged view showing a variant of the bondingunit 300 in a schematic section thereof. The illustrated bonding unit300 has the same structure as that of the bonding unit 300 shown in FIG.10 , except for a portion explained next. Accordingly, commonconstituent elements are given the same reference numbers, and the sameexplanation is not repeated.

In the illustrated bonding unit 300, the upper stage 322 has a pluralityof ventilation holes 325 penetrating therethrough in the thicknessdirection. The lower end, in the figure, of each of the ventilationholes 325 has an opening at the lower surface of the upper stage 322.The upper end, in the figure, of each of the ventilation holes 325 iscoupled through a valve 632 to a tank 631 disposed outside the bondingunit 300.

Fluid that causes no problems even if it is mixed into the atmosphere ofthe substrates 211, 213 such as dry air or an inert gas is housed in thetank 631 at a pressure higher than the atmospheric pressure. The valve632 opens and closes under the control of the control unit 150. If thevalve 632 is opened, the fluid supplied from the tank 631 is injectedfrom the upper stage 322 through the ventilation holes 325.

In addition, in the illustrated bonding unit 300, the substrate holder221 held by the upper stage 322 also has a plurality of ventilationholes 225 penetrating therethrough in the thickness direction atpositions corresponding to the ventilation holes 325 of the upper stage322. Thereby, if the valve 632 is opened under the control of thecontrol unit 150, the fluid supplied from the tank 631, for example, aninert gas such as a nitrogen gas or an argon gas, is injected from theventilation holes 225 of the substrate holder 221. Thereby, for example,if the substrate 211 is adsorbed to the substrate holder 221 even afterpower supply to an electrostatic chuck or the like is terminated, thesubstrate 211 can be forcibly pushed off, thereby improving thethroughput of the substrate bonding apparatus 100.

FIG. 34 is a flowchart showing a part of a control procedure performedon and around the stages of the above-mentioned bonding unit 300. Theillustrated procedure may be executed in the course from Step S107 toStep S112 in the procedure shown in FIG. 3 . Accordingly, in thefollowing explanation, correspondence to the procedure shown in FIG. 3is shown as well, together with the procedure shown in FIG. 34 .

First, at Step S106 in FIG. 3 , if the substrate 211 held by the upperstage 322 and the substrate 213 held by the lower stage 332 arepositioned relative to each other, the control unit 150 raises the lowerstage 332 (Step S201) and at the same time determines whether or not thesubstrates 211, 213 abut against each other (Step S202). The lower stage332 is kept being raised until the substrates 211, 213 abut against eachother (Step S202: NO).

Upon detecting that the substrates 211, 213 which have been broughtclose to each other along with raising of the lower stage 332 abutagainst each other (Step S202: YES), the control unit 150 brings thesubstrate 213 held by the lower stage 332 and the substrate 211 held bythe upper stage 322 close to each other. If the lower stage 332 israised further, as shown in FIG. 35 , the substrates 211, 213 abutagainst each other (Step S202: YES).

FIG. 35 is a schematic sectional view showing the state where thesubstrates 211, 213 abut against each other as a result of rising of thelower stage 332. Elements common to those in FIG. 34 are given the samereference numbers, and the same explanation is not repeated. Asillustrated, because the substrate 211 held by the upper stage 322 isheld in a state where a middle portion thereof is projecting downward inthe figure, first, partially the middle portion is pressed against thesubstrate 213 held by lower stage 332 in a flat state (Step S107).

Referring again to FIG. 34 , next, the control unit 150 startsmeasurement of pressure that the upper stage 322 receives due to risingof the lower stage 332, through the load cell 380 disposed between theupper stage 322 and the top plate 316 (Step S203). In addition, thecontrol unit 150 determines whether or not a region where the abuttingsubstrates 211, 213 are bonded together has been formed in thesubstrates 211, 213 (Step S108), and waits until a bonding startingpoint is formed between the substrates 211, 213 (Step S204: NO).

Thereby, upon detecting that a bonding starting point is formed betweenthe substrates 211, 213 (Step S204: YES), the control unit 150 uses theposition in the raising/lowering direction of the lower stage 332 atthis moment, that is, a position Lo in the Z direction shown in FIG. 35as a reference position for the control of the position of the lowerstage 332. In addition, the control unit 150 stores, as the controlreference pressure for the control of the position of the lower stage inthe Z direction, a pressure measured by the load cell 380 when the lowerstage 332 is positioned at the reference position (Step S205).

Furthermore, upon detecting that a bonding starting point is formedbetween the substrates 211, 213 (Step S204: YES), the control unit 150discontinues at least holding of the substrate 211 on the upper stage322 side (Steps S109, S206). In addition, the control unit 150 pushesthe substrate 211 off of the substrate holder 221 held by the upperstage 322 as shown in FIG. 36 by opening the valve 632 and blowing fluidthrough the ventilation holes 325, 225 (Step S207).

FIG. 36 is a schematic sectional view showing the state where thecontrol unit 150 pushed the substrate 211 off of the upper stage 322 byinjection of fluid after a bonding starting point is formed between thesubstrates 211, 213. If fluid injected from the upper stage 322 side isblown at the substrate 211, the pressure of the fluid acts also on thelower stage 332 through the lower substrate 213 abutting against thesubstrate 211 and the substrate holder 223. Thereby, because the load onthe raising/lowering drive unit 338 driving the lower stage 332increases, the lower stage 332 is displaced downward below the referenceposition Lo.

Here, the substrate 211 initially held by the upper stage 322 ispartially bonded with the substrate 211 already held by the lower stage332. Accordingly, if the lower stage 332 is lowered, the upper substrate211 is also lowered together with it. Because of this, the intervalbetween the upper substrate holder 221 held by the upper stage 322 andthe substrate 211 widens, and the pressure of fluid between thesubstrate holder 221 and the substrate 211 lowers.

Thereby, because the value of the pressure measured by the load cell 380lowers (Step S208: YES), the control unit 150 operates theraising/lowering drive unit 338 to raise the lower stage 332 so as tobring the value of measurement by the load cell 380 close to a controlreference pressure (Step S209). That is, the Z position of the lowerstage 332 is controlled to be at a position where force that thesubstrate 211 receives from fluid and force applied by theraising/lowering drive unit 338 to lift the lower stage 332 arebalanced. If the substrate 211 is separated from the upper substrateholder 221 due to injection of fluid, the space between the substrate211 and the substrate 213 expands, and so the pressure of the fluidbetween the substrates 211, 213 lowers, and the balance of force islost. Because of this, in order to increase the pressure of the fluid,the lower stage 332 is raised to a position where the fluid pressure andforce of the raising/lowering drive unit 338 are balanced. In thismanner, as shown in FIG. 37 , the lower stage 332 is raised to approachthe reference position Lo again.

After this, the control unit 150 detects the value of the pressuremeasured by the load cell 380 to continue the control on the position ofthe lower stage 332 such that the force of the raising/lowering driveunit 338 to raise the lower stage 332 and the pressure of fluid injectedfrom the upper stage 322 are balanced and the value of the load cell 380becomes constant (Step S208: YES). But while bonding of the substrates211, 213 is progressing, the state between the upper substrate holder221 and the upper substrate 211 changes over time, and so the positionof the lower stage 332 in the Z direction does not stabilize. The spacebetween the substrate 211 and the upper substrate holder 221 becomesgradually larger and the fluid pressure becomes gradually lower as thesubstrate 211 becomes more separated from the substrate holder 221 dueto enlargement of the contact regions as the bonding wave advances, andso the Z position of the lower stage 332 is gradually raised in thecourse of enlargement of the contact regions. Upon completion ofbonding, the size of the space between the substrate 211 and thesubstrate holder 221 no longer shows changes, and the fluid pressurealso no longer shows changes so that the Z position of the lower stage332 becomes constant.

FIG. 38 is a schematic sectional view showing the state where bonding ofthe substrates 211, 213 in the bonding unit 300 is completed through andafter the course of processes like the ones mentioned above. Asillustrated, if the state between the upper substrate holder 221 and thesubstrate 211 no longer shows changes upon completion of bonding of thesubstrates 211, 213, changes in the pressure value measured by the loadcell 380 converge and the position of lower stage 332 also no longershows changes. To cope with this, for example an experimentallydetermined threshold length of time is preliminarily set, and if thevalue of pressure measured by the load cell 380 or the value ofdetection by a position detecting unit that detects the Z position ofthe lower stage 332 do not show changes for a threshold length of timeor longer, the control unit 150 can determine that bonding of thesubstrates 211, 213 is completed (Step S210).

In the above-mentioned example, the control unit 150 can determine thatabnormality is occurring in bonding if the progress of the bonding wavestopped, if the degree of progress is uneven in the circumferentialdirection of the substrates 211, 213, or in other cases. In this case,the control unit 150 outputs a signal to solve the abnormality accordingto the cause of the abnormality.

For example, if the progress of the bonding wave is uneven due topresence of dust between the substrates 211, 213, a signal instructingto clean substrate holders or stages is output to a cleaning apparatus.

If a substrate is deformed by the above-mentioned actuator, when thecause of abnormality is the amount of deformation of the substrate bythe actuator, a control signal is output from the control unit 150 to acontrol unit that controls driving by the actuator so as to adjust theamount of driving by the actuator to adjust the deformation amount.

In the examples shown in FIG. 33 to FIG. 38 , if the cause ofabnormality is the flow rate of fluid or fluid pressure, the controlunit 150 adjusts the rate of flow or the pressure of fluid fromventilation holes 325 corresponding to regions where the progress of thebonding wave is faster or slower than in other regions.

If the cause of abnormality is at least one of the ambient temperatureand atmospheric pressure of the upper stage 322 and the lower stage 332,a control signal is output, instructing a temperature adjustingapparatus or pressure adjusting apparatus (not illustrated) to changethe temperature or atmospheric pressure.

If a region where the progress of the bonding wave is slow is detectedin the region of the substrate 211, at least one of the upper stage 322and the lower stage 332 may be tilted so that the region is broughtclose to the substrate 213.

If the cause of abnormality is unevenness in activation on a surface(s)of at least one of the two substrates 211, 213, the control unit 150outputs, to an activation apparatus, a control signal instructing toadjust the degree of activation according to the distribution of thedegree of progress of the bonding wave.

If the cause of abnormality is the amounts of deformation of thesubstrates 211, 213 including the warping amount, the control unit 150outputs, to a pre-processing apparatus such as a film formationapparatus or an exposure apparatus used at steps of manufacturing thesubstrates 211, 213, a control signal instructing to adjust the amountsof deformation generated to the substrates.

In addition, if it takes a long time to form a starting point, it can beassumed that the cause of it is that the degrees of activation ofsubstrates are too low, that the pressing force at the time of contactbetween the substrates 211, 213 is too low, and so on so that thecontrol unit 150 outputs a control signal instructing to adjust thedegrees of activation to an activation apparatus, controls the drivingamount of the lower stage 332 at the time of contact between thesubstrates 211, 213, and so on.

The above-mentioned feedback control by the control unit 150 may beimplemented in real time or may be performed in bonding of nextsubstrates. In addition, the feedback control may be implemented foreach lot of substrates, every time the recipe for bonding processes ischanged, or on other bases.

While the embodiment(s) of the present invention has (have) beendescribed, the technical scope of the invention is not limited to theabove described embodiment(s). It is apparent to persons skilled in theart that various alterations and improvements can be added to theabove-described embodiment(s). It is also apparent from the scope of theclaims that the embodiments added with such alterations or improvementscan be included in the technical scope of the invention.

The operations, procedures, steps, and stages of each process performedby an apparatus, system, program, and method shown in the claims,embodiments, or diagrams can be performed in any order as long as theorder is not indicated by “prior to,” “before,” or the like and as longas the output from a previous process is not used in a later process.Even if the process flow is described using phrases such as “first” or“next” in the claims, embodiments, or diagrams, it does not necessarilymean that the process must be performed in this order.

EXPLANATION OF REFERENCE SYMBOLS

-   -   100: substrate bonding apparatus; 110: housing; 120, 130:        substrate cassette; 140: carrying unit; 150: control unit; 210,        211, 213: substrate; 212: scribe line; 214: notch; 216: circuit        region; 218: alignment mark; 220, 221, 223: substrate holder;        222, 224: holding surface; 225, 325: ventilation hole; 227, 228,        229: observation hole; 230: bonded substrate; 231: starting        point; 232: bonding wave; 300: bonding unit; 310: frame body;        312: base plate; 314: support; 316: top plate; 322: upper stage;        324, 334: microscope; 326, 336: activation apparatus; 327, 328,        329: observation window; 331: X-direction driving unit; 332:        lower stage; 333: Y-direction driving unit; 338:        raising/lowering drive unit; 341, 342, 343: detector; 344, 345,        346, 347, 348, 349, 610, 620: observing unit; 351, 361, 362,        363: light source; 354: optical fiber; 364: background board;        352, 371, 372, 373: light-receiving unit; 353: displacement        gauge; 374: image-capturing unit; 380: load cell; 390:        microphone; 391: vibration generating unit; 392: vibration        detecting unit; 400: holder stocker; 500: pre-aligner; 621:        capacitance detecting unit; 631: tank; 632: valve

What is claimed is:
 1. A substrate bonding apparatus that bonds a firstsubstrate and a second substrate so that contact regions in which thefirst substrate and the second substrate contact are formed in parts ofthe first substrate and the second substrate and the contact regionsenlarge from the parts, the substrate bonding apparatus comprising: adetecting unit that detects information about the contact regions; and adetermining unit that determines that the first substrate and the secondsubstrate can be carried out based on the information detected at thedetecting unit.
 2. The substrate bonding apparatus according to claim 1,wherein the information is information, a value of which changesaccording to progress of enlargement of the contact regions, and thedetermining unit determines that the first substrate and the secondsubstrate can be carried out if the value becomes constant or if a rateof changes in the value becomes lower than a predetermined value.
 3. Thesubstrate bonding apparatus according to claim 1, wherein theinformation includes information about a change in an opticalcharacteristic of at least one substrate among the first substrate andthe second substrate in a course of enlargement of the contact regions,and the determining unit determines that the first substrate and thesecond substrate can be carried out if the change in the opticalcharacteristic meets a predetermined condition.
 4. The substrate bondingapparatus according to claim 3, wherein the information includesinformation about a change in reflectance of light in the at least onesubstrate among the first substrate and the second substrate.
 5. Thesubstrate bonding apparatus according to claim 3, wherein theinformation includes information about a change in luminance in acaptured image of the at least one substrate among the first substrateand the second substrate.
 6. The substrate bonding apparatus accordingto claim 3, wherein the information includes information about a changein a luminous flux blocked by the at least one substrate among the firstsubstrate and the second substrate.
 7. The substrate bonding apparatusaccording to claim 3, wherein the determining unit determines that thefirst substrate and the second substrate can be carried out if theoptical characteristic becomes constant or if a rate of changes thereinbecomes lower than a predetermined value.
 8. The substrate bondingapparatus according to claim 1, wherein the information includes atleast one of information about a change in distance between the firstsubstrate and the second substrate and information about a change indistance between at least one substrate among the first substrate andthe second substrate and a holding unit holding the at least onesubstrate.
 9. The substrate bonding apparatus according to claim 8,wherein the determining unit determines that the first substrate and thesecond substrate can be carried out if a value of the distance becomesconstant or if a rate of changes therein becomes lower than apredetermined value.
 10. The substrate bonding apparatus according toclaim 1, wherein the information includes information about a change inan electrical characteristic in at least one substrate among the firstsubstrate and the second substrate.
 11. The substrate bonding apparatusaccording to claim 10, wherein the information includes informationabout a change in capacitance between the first substrate and the secondsubstrate.
 12. The substrate bonding apparatus according to claim 1,wherein the information is information about a boundary betweennon-contact regions in which the first substrate and the secondsubstrate are not contacting and the contact regions, the contactregions enlarge as the boundary moves toward circumferential portions ofthe first substrate and the second substrate, and the determining unitdetermines that the first substrate and the second substrate can becarried out if a position of the boundary reaches a predeterminedposition.
 13. The substrate bonding apparatus according to claim 12,wherein the predetermined position is a circumferential portion of atleast one substrate among the first substrate and the second substrate.14. The substrate bonding apparatus according to claim 1, wherein theinformation includes information about a shape of the contact regions,and the determining unit determines that the first substrate and thesecond substrate can be carried out if the shape becomes a predeterminedshape.
 15. The substrate bonding apparatus according to claim 1, whereinthe information is a progress speed at which the contact regionsenlarge, and the determining unit predicts a time at which bonding ofthe first substrate and the second substrate is completed based on theprogress speed.
 16. The substrate bonding apparatus according to claim1, wherein the detecting unit detects bonding force of the contactregions formed in the parts, and if it is determined that the bondingforce is predetermined bonding force, the determining unit startsenlargement of the contact regions.
 17. The substrate bonding apparatusaccording to claim 1, wherein the determining unit determines presenceor absence of abnormality in bonding of the first substrate and thesecond substrate based on a result of detection by the detecting unit.18. A substrate bonding method of bonding a first substrate and a secondsubstrate so that contact regions in which the first substrate and thesecond substrate contact are formed in parts of the first substrate andthe second substrate and the contact regions enlarge from the parts, thesubstrate bonding method comprising: detecting information about thecontact regions; and determining that the first substrate and the secondsubstrate can be carried out based on the information detected at thedetecting.